US Patent Issued to DEVICE on Nov. 11 for "Ultrasonic cleaning unit with improved cleaning performance, and substrate cleaning apparatus including the same" (South Korean Inventor)

ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,465,958, issued on Nov. 11, was assigned to DEVICE Co. Ltd (Cheonan-si, South Korea).

"Ultrasonic cleaning unit with improved cleaning performance, and substrate cleaning apparatus including the same" was invented by Taek Youb Lee (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates to an ultrasonic cleaning unit with improved cleaning performance, which can improve overall substrate cleaning performance through improvement in the structure of a cleaning head of the ultrasonic cleaning unit, and the ultrasonic cleaning unit includes: a driving unit for receiving external power and vibrating an internal vi...