US Patent Issued to DELMIC IP on Aug. 12 for "Apparatus and method for detecting one or more scanning charged particle beams" (Dutch Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,387,905, issued on Aug. 12, was assigned to DELMIC IP B.V. (Delft, Netherlands).

"Apparatus and method for detecting one or more scanning charged particle beams" was invented by Lenard Maarten Voortman (Delft, Netherlands) and Andries Pieter Johan Effting (Delft, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method and an apparatus are provided for inspecting a sample. The apparatus includes a sample holder for holding the sample, a charged particle column for generating and focusing one or more charged particle beams at one or more charged particle beam spots onto the sample, a scanning deflector for moving the charged particle beam spot...