ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,421,106, issued on Sept. 23, was assigned to CYTOSURGE AG (Glattbrugg, Switzerland).
"Method of manufacturing a MEMS device" was invented by Edin Sarajlic (Zutphen, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of manufacturing a MEMS device comprising a main body and a protrusion. To provide a generic method of manufacturing a protrusion with reduced vulnerability, the method includes creating a recess in a wafer substrate, said recess having an upper recess section and a lower recess section. The upper recess section is created using anisotropic etching and the lower recess section is formed using corner lithography followed by ...