US Patent Issued to Cymer on Oct. 7 for "Apparatus for and method of modulating a light source wavelength" (California Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,334, issued on Oct. 7, was assigned to Cymer LLC (San Diego).

"Apparatus for and method of modulating a light source wavelength" was invented by Kuo-Tai Teng (Poway, Calif.), Rahul Ahlawat (San Diego) and Piraj Fozoonmayeh (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatus for and method of controlling a laser system capable of generating bursts of pulses of laser radiation having multiple alternate wavelengths in which an element controlling the wavelength is pre-positioned between bursts to be between its position for generating one wavelength and its position for generating another wavelength. Also disclosed is a system that deter...