ALEXANDRIA, Va., June 17 -- United States Patent no. 12,316,063, issued on May 27, was assigned to Cymer LLC (San Diego).

"Output light beam formation apparatus" was invented by Yuda Wang (San Diego) and Rostislav Rokitski (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus includes: abeam splitter on abeam path, the beam splitter configured to receive light from a deep ultraviolet (DUV) light source; and a first plurality of reflective optical elements on the beam path. The beam splitter is configured to direct a portion of the light received from the DUV light source toward the first plurality of reflective optical elements; the first plurality of reflective optical elements is configure...