US Patent Issued to Cymer on May 13 for "Apparatus for and methods of combining multiple laser beams" (California, Oregon Inventors)

ALEXANDRIA, Va., June 12 -- United States Patent no. 12,298,670, issued on May 13, was assigned to Cymer LLC (San Diego).

"Apparatus for and methods of combining multiple laser beams" was invented by Rabin Paudel (Portland, Ore.), Eric Anders Mason (San Diego), Gamaralalage G. Padmabandu (San Diego) and John Theodore Melchior (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatus for and methods of combining multiple, i.e., two or more laser beams to reduce even to the point of elimination a transverse gap between the two or more beams caused, for example, by a space between a coating on a surface of the mirror and the edge of the mirror, or by optic geometry, is avoided."

The patent was filed ...