US Patent Issued to Cymer on July 29 for "Control system for a plurality of deep ultraviolet optical oscillators" (California Inventors)

ALEXANDRIA, Va., July 30 -- United States Patent no. 12,374,853, issued on July 29, was assigned to Cymer LLC (San Diego).

"Control system for a plurality of deep ultraviolet optical oscillators" was invented by Yingbo Zhao (San Diego), Walter Dale Gillespie (Poway, Calif.), Joshua Jon Thornes (San Diego), Thomas Patrick Duffey (San Diego) and Eric Anders Mason (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "A deep ultraviolet (DUV) optical system includes: an optical source system including: a plurality of optical oscillators; a beam combiner; and a beam control apparatus between the optical oscillators and the beam combiner. The beam combiner is configured to receive and direct light emitted from...