US Patent Issued to Cymer on July 15 for "Maintenance of modules for light sources used in semiconductor photolithography" (California Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,360,466, issued on July 15, was assigned to Cymer LLC (San Diego).

"Maintenance of modules for light sources used in semiconductor photolithography" was invented by Russell Allen Burdt (San Diego), Kumar Raja Guvindan Raju (San Diego), Matthew Minakais (San Diego) and David Wesley Manley (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems for maintaining light sources for semiconductor photolithography in which a module making up part of the light source is evaluated at various pulse counts to produce a binary prediction as to whether the module is sufficiently likely to operate without failure in an ensuing sequence of pulses. The binary ...