US Patent Issued to Cymer on Jan. 20 for "Method of compensating wavelength error induced by repetition rate deviation" (California Inventors)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,529,962, issued on Jan. 20, was assigned to Cymer LLC (San Diego).

"Method of compensating wavelength error induced by repetition rate deviation" was invented by Kuo-Tai Teng (Poway, Calif.) and Rahul Ahlawat (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "A radiation system for controlling pulses of radiation comprising an optical element configured to interact with the pulses of radiation to control a characteristic of the pulses of radiation, an actuator configured to actuate the optical element according to a control signal received from a controller, the control signal at least partially depending on a reference pulse repetition rate of t...