ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,540,850, issued on Feb. 3, was assigned to Cymer LLC (San Diego).
"Predictive calibration scheduling apparatus and method" was invented by Mohammad Taghi Mohebbi (San Diego) and Spencer Ryan Williams (San Diego).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method is performed for scheduling a calibration relating to an optical device in a light source. The method can be performed by a calibration system including a calibration apparatus and a prediction controller. The method includes: receiving a property associated with the optical device while the optical device is being calibrated; calculating a current degradation metric based at least on the opt...