US Patent Issued to Cymer on Aug. 26 for "Laser light energy and dose control using repetition rate based gain estimators" (California Inventors)

ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,401,169, issued on Aug. 26, was assigned to Cymer LLC (San Diego).

"Laser light energy and dose control using repetition rate based gain estimators" was invented by Yingbo Zhao (San Diego) and Kevin O'Brien (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "A laser system's laser light energy control and resulting dose control is improved by creating and using a set of gain estimators, one for each of a set or range of laser light pulse repetition rates. When a new repetition rate is used, its corresponding gain estimator is retrieved, used to compute the voltage to fire the laser source, and updated. The resulting generated laser light thereby a...