ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,475,297, issued on Nov. 18, was assigned to Coventor Inc. (Cary, N.C.).
"System and method for performing process model calibration in a virtual semiconductor device fabrication environment" was invented by William J. Egan (Framingham, Mass.), Kenneth B. Greiner (Concord, Mass.), David M. Fried (Los Gatos, Calif.) and Anshuman Kunwar (Jamaica Plain, Mass.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A virtual fabrication environment for semiconductor device fabrication that includes an analytics module for performing key parameter identification, process model calibration and variability analysis is discussed."
The patent was filed on Nov. 7, 2023, u...