US Patent Issued to COMET on Nov. 18 for "Method for generating an RF signal, controller, RF generator and plasma apparatus" (German, Swiss Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,476,083, issued on Nov. 18, was assigned to COMET AG (Flamatt, Switzerland).

"Method for generating an RF signal, controller, RF generator and plasma apparatus" was invented by Andre Grede (Bern, Switzerland), Daniel Gruner (Badenweiler, Germany), Anton Labanc (Ehrenkirchen, Germany), Roland Schlierf (Frechen, Germany), Nikolai Schwerg (Bern, Switzerland) and Manuel vor dem Brocke (Bramsche, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for generating an RF signal preferably for a plasma chamber including the steps of: generating an input RF signal on the basis of a first set of control parameters; detecting at least one distorted RF s...