US Patent Issued to Coherent on May 6 for "Diode-pumped solid-state laser apparatus for laser annealing" (American, German Inventors)

ALEXANDRIA, Va., June 10 -- United States Patent no. 12,294,194, issued on May 6, was assigned to Coherent Inc. (Santa Clara, Calif.).

"Diode-pumped solid-state laser apparatus for laser annealing" was invented by Norman Hodgson (Belmont, Calif.), Andrea Caprara (Palo Alto, Calif.) and Kai Schmidt (Leinefelde, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "Laser annealing apparatus includes a plurality of frequency-tripled solid-state lasers, each delivering an output beam of radiation at a wavelength between 340 nm and 360 nm. Each output beam has a beam-quality factor (M2) greater of than 50 in one transverse axis and greater than 20 in another transverse axis. The output beams are combined and for...