US Patent Issued to Cleanpart Group on April 8 for "Process chamber component and method of forming a surface texture" (French Inventor)

ALEXANDRIA, Va., April 9 -- United States Patent no. 12,269,095, issued on April 8, was assigned to Cleanpart Group GmbH (Asperg, Germany).

"Process chamber component and method of forming a surface texture" was invented by Olivier Marchand (Genoble, France).

According to the abstract* released by the U.S. Patent & Trademark Office: "The invention relates to a method of forming a surface texture on a process chamber component in the form of an annular shield element for use in a substrate processing chamber which is designed for manufacturing wafers, chips or dies, the process chamber component forming a shield element and having at least one component surface, the method comprising the step of forming the surface texture on the at least ...