ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,449,065, issued on Oct. 21, was assigned to CKD Corp. (Komaki, Japan).
"Pressure control valve" was invented by Toshikazu Ogisu (Komaki, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A pressure control valve for opening/closing a circular outlet port that connects a vacuum chamber used in a semiconductor manufacturing apparatus and an exhaust pump for evacuating the vacuum chamber, the pressure control valve including a valve unit that contacts and separates from a valve seat provided radially outward from the outlet port, wherein the valve unit includes: a hollow portion located between an upper surface of the valve unit on the vacuum chamber si...