ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,466,025, issued on Nov. 11, was assigned to ChEmpower Corp. (Beaverton, Ore.).
"Pad surface regeneration and metal recovery" was invented by Sudhanshu Misra (Beaverton, Ore.) and Babu Suryadevara (Portland, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method comprises planarizing a substrate material with a functionalized chemical planarization pad. The functionalized chemical planarization pad includes a plurality of functional groups bonded to a material of the pad. The functional groups are configured to chemically react with the substrate material such that a portion of substrate material bonds to the functional groups. The pad is regenerat...