US Patent Issued to CHANGZHOU CHEMSEMI on July 22 for "Method for forming bulk acoustic wave resonance device" (Chinese Inventor)

ALEXANDRIA, Va., July 23 -- United States Patent no. 12,368,426, issued on July 22, was assigned to CHANGZHOU CHEMSEMI Co. LTD. (Changzhou, China).

"Method for forming bulk acoustic wave resonance device" was invented by Yuhao Liu (Shanghai).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for forming a bulk acoustic wave resonance device is provided, including forming a first stack, wherein forming the first stack includes: providing a first substrate; forming a piezoelectric layer on the first substrate; forming a first electrode layer on the piezoelectric layer; and forming a cavity pretreatment layer on the piezoelectric layer, wherein a first side of the first stack corresponds to a side of the fi...