US Patent Issued to CHANGXIN MEMORY TECHNOLOGIES on Sept. 9 for "Developing device and developing method" (Chinese Inventor)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,411,423, issued on Sept. 9, was assigned to CHANGXIN MEMORY TECHNOLOGIES INC. (Hefei, China).

"Developing device and developing method" was invented by Peng Dong (Hefei, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "The developing device comprises: a development chamber that is provided with an air extraction pipeline for extracting air inside the development chamber to outside the development chamber; a carrier that is disposed in the development chamber for supporting a wafer; a plurality of temperature sensors that are disposed on the carrier for detecting temperatures of a plurality of target regions; a plurality of mutually independent air ...