ALEXANDRIA, Va., Sept. 17 -- United States Patent no. 12,417,936, issued on Sept. 16, was assigned to CHANGXIN MEMORY TECHNOLOGIES INC. (Hefei, China).
"Semiconductor etching apparatus" was invented by Faming Zhang (Hefei, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor etching apparatus includes: a backing ring, a supporting mechanism, an edge ring and a temperature control mechanism. The edge ring is arranged between the backing ring and the supporting mechanism. The temperature control mechanism includes a heating unit arranged below the edge ring. The temperature control mechanism further includes a temperature controller electrically connected with the heating unit."
The patent was...