US Patent Issued to CHANGXIN MEMORY TECHNOLOGIES on June 24 for "Apparatus match detection method, detection system, prewarning method, and prewarning system" (Chinese Inventor)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,341,070, issued on June 24, was assigned to CHANGXIN MEMORY TECHNOLOGIES INC. (Hefei, China).

"Apparatus match detection method, detection system, prewarning method, and prewarning system" was invented by Weigang Wang (Hefei, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure provide an apparatus match detection method, a detection system, a prewarning method and a prewarning system, the apparatus match detection method includes: providing a to-be-detected wafer, a first detection apparatus, and a second detection apparatus; measuring by the first detection apparatus a critical dimension of the first detection are...