US Patent Issued to CHANGXIN MEMORY TECHNOLOGIES on Feb. 18 for "Detaching and installing device for gas distribution plate of etching machine, and etching machine" (Chinese Inventors)

ALEXANDRIA, Va., Feb. 19 -- United States Patent no. 12,230,480, issued on Feb. 18, was assigned to CHANGXIN MEMORY TECHNOLOGIES INC. (Hefei, China).

"Detaching and installing device for gas distribution plate of etching machine, and etching machine" was invented by Ko Wei Chen (Hefei, China), Li Meng (Hefei, China) and Chien Chung Wang (Hefei, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present application provides a detaching and installing device for a gas distribution plate of an etching machine, and the etching machine, and relates to the field of semiconductor manufacturing technologies, aiming at addressing the problems that it is quite difficult to detach and install the gas distribution...