US Patent Issued to CHANGXIN MEMORY TECHNOLOGIES on Feb. 10 for "Tool and method for correcting position of wafer in semiconductor manufacturing machine" (Chinese Inventor)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,550,666, issued on Feb. 10, was assigned to CHANGXIN MEMORY TECHNOLOGIES INC. (Hefei, China).

"Tool and method for correcting position of wafer in semiconductor manufacturing machine" was invented by Zhijiu Wang (Hefei, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a tool and method for correcting a position of a wafer in a semiconductor manufacturing machine, including: a cover plate, disposed on one side that is of the chamber away from the wafer bearing apparatus, the cover plate is provided with a mounting hole; a transparent plate, installed in the mounting hole, a projection of the wafer bearing apparatus o...