US Patent Issued to CHANGXIN MEMORY TECHNOLOGIES on April 15 for "Wafer scheduling method and wafer scheduling apparatus for etching equipment" (Chinese Inventors)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,276,972, issued on April 15, was assigned to CHANGXIN MEMORY TECHNOLOGIES INC. (Hefei, China).

"Wafer scheduling method and wafer scheduling apparatus for etching equipment" was invented by Jianping Wang (Hefei, China), Chien-Hung Chen (Hefei, China) and Jinjin Cao (Hefei, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present application relates to the technical field of semiconductors, and in particular, to a wafer scheduling method and a wafer scheduling apparatus for an etching equipment. The wafer scheduling method includes: obtaining a wafer processing request, where the wafer processing request includes at least process information of wa...