ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,460,132, issued on Nov. 4, was assigned to CENTRAL GLASS COMPANY Ltd. (Yamaguchi, Japan).
"Method for supplying composition, composition and dry etching method" was invented by Takahisa Taniguchi (Ube, Japan), Hiroyuki Oomori (Ube, Japan) and Akifumi Yao (Ube, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a method for stably supplying trimethylamine containing monomethylamine and/or dimethylamine as trace impurities at a constant makeup. The present invention relates to a method for supplying a composition including keeping a storage container that encloses a composition therein at a constant temperature of 10deg C. or higher to supply...