US Patent Issued to Carnegie Mellon University on Nov. 11 for "Mems platform for thin film nanomechanics characterization" (Pennsylvania Inventors)

ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,469,673, issued on Nov. 11, was assigned to Carnegie Mellon University (Pittsburgh).

"Mems platform for thin film nanomechanics characterization" was invented by Maarten de Boer (Pittsburgh) and Longchang Ni (Pittsburgh).

According to the abstract* released by the U.S. Patent & Trademark Office: "A micro-electromechanical system (MEMS) device includes a silicon substrate; and a Tantalum (Ta) layer comprising a first portion and a second portion, a first portion being suspended over the silicon substrate and configured to move relative to the silicon substrate, and the second portion of the structure being coupled to the silicon substrate and fixed in place relative to the silicon sub...