US Patent Issued to Carl Zeiss SMT on Sept. 9 for "Projection objective including an optical device" (German, American Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,411,417, issued on Sept. 9, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Projection objective including an optical device" was invented by Johannes Lippert (Buch am Wald, Germany), Toralf Gruner (Aalen-Hofen, Germany), Kerstin Hild (Waldstetten, Germany), Hans Michael Stiepan (Aalen, Germany), Thilo Pollak (Neresheim, Germany) and Jeffrey Cavaco (Boylston, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A projection exposure apparatus comprises a projection objective, and the projection objective comprises an optical device, wherein the optical device comprises an optical element having an optically effective surface and an electros...