US Patent Issued to Carl Zeiss SMT on Sept. 23 for "Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method" (German Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,422,743, issued on Sept. 23, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method" was invented by Renzo Capelli (Heidenheim, Germany), Markus Koch (Neu-Ulm, Germany), Dirk Hellweg (Langenau, Germany), Walter Pauls (Huettlingen, Germany), Grizelda Kersteen (Ulm, Germany) and Klaus Gwosch (Aalen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "When measuring a reflectivity of an object for measurement light, initially the object and a reflectivity measurement apparatus are provided. The latter includes a measurement light...