US Patent Issued to Carl Zeiss SMT on Oct. 14 for "Optical assembly, method for controlling an optical assembly, and projection exposure apparatus" (German Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,443,110, issued on Oct. 14, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Optical assembly, method for controlling an optical assembly, and projection exposure apparatus" was invented by Markus Raab (Schillingsfuerst, Germany), Andreas Raba (Niederschoenenfeld, Germany), Johannes Lippert (Buch am Wald, Germany) and Matthias Manger (Aalen-Unterkochen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "An optical assembly for semiconductor lithography comprises an optical element and an actuator for deforming the optical element. The actuator is constructed from at least three sections, which include at least first and second group of se...