ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,443,109, issued on Oct. 14, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).
"EUV collector" was invented by Valentin Jonatan Bolsinger (Aalen, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "An EUV collector has a reflection surface with a basic mirror shape of a spherical section. A diffraction grating for EUV used light is applied to the reflection surface. The diffraction grating is designed so that the EUV used light, which emanates from a sphere center of the spherical section, is diffracted by the diffraction grating toward a collection region. The collection region is spatially spaced apart from the sphere center. This creates a...