ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,468,115, issued on Nov. 11, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).
"Filter assembly, in particular for a control loop for controlling the position of at least one element" was invented by Thomas Gorius (Lauchheim, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A filter assembly, for example for a control loop for controlling the position of at least one element, comprises first and second filters. The first filter suppresses an undesired component in a signal to be filtered. The first filter produces a first signal delay in a first frequency range. The second filter produces a second signal delay in the first frequency range....