US Patent Issued to Carl Zeiss SMT on May 6 for "Insert for a source chamber of an EUV radiation source" (German Inventors)

ALEXANDRIA, Va., June 10 -- United States Patent no. 12,292,690, issued on May 6, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Insert for a source chamber of an EUV radiation source" was invented by Michael Hagg (Essingen, Germany), Juan Jose Hasbun Wood (Bruckmuhl, Germany), Iris Pilch (Aalen, Germany) and Christof Metzmacher (Aalen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "An insert for a source chamber of an EUV radiation source has a pressure stage and, spaced apart from it, a stop."

The patent was filed on July 14, 2022, under Application No. 17/864,939.

*For further information, including images, charts and tables, please visit: http://patft.uspto.gov/netacgi/nph-Parser?S...