ALEXANDRIA, Va., June 4 -- United States Patent no. 12,321,106, issued on June 3, was assigned to CARL ZEISS SMT GMBH (Oberkochen, Germany).
"Device for detecting a temperature, installation for producing an optical element and method for producing an optical element" was invented by Michael Stolz (Oberkochen, Germany) and Timo Laufer (Stuttgart, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A device (20) for detecting a temperature on a surface (15) of an optical element (14) for semiconductor lithography. The device includes an optical element (14) having a face (16) irradiated with electromagnetic radiation (7, 8, 43), a temperature recording device (21), and a temperature controlled element (22)...