ALEXANDRIA, Va., June 19 -- United States Patent no. 12,332,043, issued on June 17, was assigned to CARL ZEISS SMT GMBH (Oberkochen, Germany).
"Measurement method for interferometrically determining a surface shape" was invented by Hans Michael Stiepan (Aalen, Germany), Sebastian Fuchs (Aalen, Germany) and Jochen Hetzler (Aalen, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "Measurement method for interferometrically determining a shape of a test object (14) surface (12) includes arranging a first diffractive optical element (30, 130, 230) in an input wave (18) beam path, to generate a first test wave (34) with a wavefront that is adapted to a desired shape of the optical surface, detecting a first i...