US Patent Issued to Carl Zeiss SMT on July 29 for "Method for determining an imaging quality of an optical system when illuminated by illumination light within a pupil to be measured" (German Inventors)

ALEXANDRIA, Va., July 30 -- United States Patent no. 12,372,431, issued on July 29, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Method for determining an imaging quality of an optical system when illuminated by illumination light within a pupil to be measured" was invented by Markus Koch (Neu-Ulm, Germany), Renzo Capelli (Heidenheim, Germany), Klaus Gwosch (Aalen, Germany) and Dmitry Simakov (Jena, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "To determine an imaging quality of an optical system when illuminated by illumination light within a pupil to be measured of the optical system and/or to qualify the phase effect of a test structure, a test structure that is periodic in at leas...