US Patent Issued to Carl Zeiss SMT on Dec. 9 for "Method for determining an imaging quality of an optical system when illuminated by illumination light within an entrance pupil to be measured" (German Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,492,963, issued on Dec. 9, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Method for determining an imaging quality of an optical system when illuminated by illumination light within an entrance pupil to be measured" was invented by Klaus Gwosch (Aalen, Germany), Markus Koch (Neu-Ulm, Germany), Lars Stoppe (Jena, Germany), Manuel Decker (Jena, Germany) and Lukas Fischer (Leinfelden-Echterdingen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "To determine an imaging quality of an optical system when illuminated by illumination light within an entrance pupil or exit pupil, a test structure is initially arranged in an object plane of th...