US Patent Issued to Carl Zeiss SMT on April 29 for "Method for determining a production aerial image of an object to be measured" (German Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,288,272, issued on April 29, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Method for determining a production aerial image of an object to be measured" was invented by Martin Dietzel (Giengen a. d. Brenz, Germany) and Renzo Capelli (Heidenheim, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "In order to determine a production aerial image of an object to be measured as a result of an illumination and imaging with illumination and imaging conditions of an optical production system, firstly a measurement aerial image of the object to be measured is captured. This is carried out with illumination and imaging conditions of an optical me...