US Patent Issued to Carl Zeiss SMT on April 29 for "Damping arrangement for vibration damping of an element in an optical system" (German Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,287,587, issued on April 29, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Damping arrangement for vibration damping of an element in an optical system" was invented by Marwene Nefzi (Ulm, Germany), Stefan Hembacher (Bobingen, Germany), David Schoenen (Aalen, Germany) and Jens Kugler (Aalen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosure relates to a damping arrangement for vibration damping of an element in an optical system, for example in a microlithographic projection exposure apparatus. A damping arrangement according to the disclosure has an element, a fluid located in a cavity, and at least one channel connecte...