US Patent Issued to Carl Zeiss MultiSEM on Sept. 30 for "Multi-beam digital scan and image acquisition" (German Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,431,324, issued on Sept. 30, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany).

"Multi-beam digital scan and image acquisition" was invented by Nicolas Kaufmann (Aalen, Germany), Andreas Adolf (Aalen, Germany), Volker Wieczorek (Neu-Ulm, Germany), Nico Kaemmer (Koenigsbronn, Germany), Christof Riedesel (Aalen, Germany) and Stefan Schubert (Oberkochen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multi-beam charged particle microscope and a method of operating a multi-beam charged particle microscope for wafer inspection with high throughput and with high resolution and high reliability are provided. The method of operation and ...