ALEXANDRIA, Va., June 10 -- United States Patent no. 12,293,896, issued on May 6, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany).
"Particle beam system" was invented by Dirk Zeidler (Oberkochen, Germany), Hans Fritz (Glottertal, Germany), Ingo Mueller (Aalen, Germany), Stefan Schubert (Oberkochen, Germany), Arne Thoma (Aalen, Germany) and Andras Major (Oberkochen, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A particle beam system includes: a multi-beam particle source configured to generate a multiplicity of particle beams; an imaging optical unit configured to image an object plane in particle-optical fashion into an image plane and direct the multiplicity of particle beams on the...