US Patent Issued to Carl Zeiss MultiSEM on March 18 for "Multi-beam particle beam system and method for operating same" (German Inventors)

ALEXANDRIA, Va., March 19 -- United States Patent no. 12,255,040, issued on March 18, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany).

"Multi-beam particle beam system and method for operating same" was invented by Dirk Zeidler (Oberkochen, Germany), Christof Riedesel (Aalen, Germany), Arne Thoma (Aalen, Germany), Georgo Metalidis (Koenigsbronn-Zang, Germany), Joerg Jacobi (Herbrechtingen, Germany), Stefan Schubert (Oberkochen, Germany), Ralf Lenke (Lauchheim, Germany), Ulrich Bihr (Kirchheim/Dirgenheim, Germany), Yanko Sarov (Aalen, Germany) and Georg Kurij (Aalen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of operating a multi-beam particle beam system includes: generati...