US Patent Issued to Carl Zeiss MultiSEM on June 24 for "Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product" (German Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,340,973, issued on June 24, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany).

"Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product" was invented by Stefan Schubert (Oberkochen, Germany), Dieter Schumacher (Gerstetten, Germany), Erik Essers (Aalen, Germany), Ingo Mueller (Aalen, Germany), Arne Thoma (Heidenheim, Germany), Joerg Jacobi (Heidenheim, Germany), Wilhelm Bolsinger (Oberkochen, Germany) and Dirk Zeidler (Oberkochen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A particle beam system, such as a multi-beam parti...