US Patent Issued to Carl Zeiss MultiSEM on Dec. 30 for "Particle beam system having a multi-pole lens sequence for independently focusing a multiplicity of individual particle beams, and its use and associated method" (German, Swiss Inventors)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,291, issued on Dec. 30, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany).

"Particle beam system having a multi-pole lens sequence for independently focusing a multiplicity of individual particle beams, and its use and associated method" was invented by Dirk Preikszas (Oberkochen, Germany), Hans Fritz (Grabs, Switzerland) and Andras G. Major (Oberkochen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A particle beam system includes a multiple beam particle source to generate a multiplicity of charged individual particle beams, and a multi-pole lens sequence with first and second multi-pole lens arrays. The particle beam system a...