US Patent Issued to Carl Zeiss MultiSEM on Dec. 2 for "Method for operating a multi-beam particle beam microscope" (German Inventors)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,488,958, issued on Dec. 2, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany).

"Method for operating a multi-beam particle beam microscope" was invented by Dirk Zeidler (Oberkochen, Germany), Gregor Dellemann (Aalen, Germany) and Gunther Scheunert (Muenster, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for operating a multi-beam particle beam microscope includes: scanning a multiplicity of particle beams over an object; directing electron beams emanating from impingement locations of the particle beams at the object onto an electron converter; detecting first signals generated by impinging electrons in the electron converte...