US Patent Issued to Carl Zeiss MultiSEM on April 22 for "Multiple particle beam microscope and associated method with an improved focus setting taking into account an image plane tilt" (German Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,457, issued on April 22, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany).

"Multiple particle beam microscope and associated method with an improved focus setting taking into account an image plane tilt" was invented by Nicole Rauwolf (Birkhausen, Germany), Nico Kaemmer (Koenigsbronn, Germany), Michael Behnke (Eislingen, Germany), Ingo Mueller (Aalen, Germany), Dirk Zeidler (Oberkochen, Germany), Arne Thoma (Heidenheim, Germany), Christof Riedesel (Aalen, Germany) and Gunther Scheunert (Muenster, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multiple particle beam microscope and an associated method set a desired focal plane ...