ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,542,252, issued on Feb. 3, was assigned to Carl Zeiss Microscopy GmbH (Jena, Germany).
"Method of operating a particle beam system, particle beam system, non-transitory storage medium and program" was invented by Bjorn Gamm (Koenigsbronn, Germany) and Rainer Arnold (Thalfingen, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of operating a particle beam system comprises positioning a sample at a given distance away from a lens focusing a particle beam; performing a measurement for each selected energization of a plurality of measurement energizations, wherein each measurement comprises recording a value derived from a reading of an electr...