US Patent Issued to Carl Zeiss Microscopy on Dec. 30 for "Method of processing a sample, particle beam system, and computer program product" (German Inventors)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,296, issued on Dec. 30, was assigned to Carl Zeiss Microscopy GmbH (Jena, Germany).

"Method of processing a sample, particle beam system, and computer program product" was invented by Andreas Schmaunz (Oberkochen, Germany) and Gero Walter (Westhausen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "While the sample is in a vacuum chamber of the particle beam system, a method comprises: processing the sample via an automatic supply in accordance with a process gas supply setting of at least one of a plurality of different process gases to the sample via a process gas supply device and via an activation of the supplied, at least one process gas...