US Patent Issued to CANON TOKKI on Nov. 4 for "Deposition apparatus, electronic device manufacturing apparatus, and deposition method" (Japanese Inventor)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,463,071, issued on Nov. 4, was assigned to CANON TOKKI Corp. (Mitsuke, Japan).

"Deposition apparatus, electronic device manufacturing apparatus, and deposition method" was invented by Takuhei Mimura (Kawasaki, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A deposition apparatus includes a transport mechanism including a transport carrier which holds and transports a substrate and transport modules which constitute a transport path through which the transport carrier moves, an alignment chamber in which the substrate held by the transport carrier is loaded and a mask is positioned and fixed to the loaded substrate, a deposition chamber in which the...