US Patent Issued to CANON TOKKI on July 8 for "Alignment apparatus, deposition apparatus, electronic device manufacturing apparatus, and alignment method" (Japanese Inventor)

ALEXANDRIA, Va., July 9 -- United States Patent no. 12,354,894, issued on July 8, was assigned to CANON TOKKI Corp. (Mitsuke, Japan).

"Alignment apparatus, deposition apparatus, electronic device manufacturing apparatus, and alignment method" was invented by Toshiaki Himeji (Kashiwa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An alignment apparatus includes: a transport mechanism including a transport carrier which holds and transports a substrate and transport modules which constitute a transport path through which the transport carrier moves; an alignment chamber in which a mask is positioned and fixed to the substrate held by the transport carrier and loaded by the transport mechanism; and contr...