US Patent Issued to Canon on Sept. 9 for "Substrate holding board, manufacturing method of device, and exposure device" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,411,426, issued on Sept. 9, was assigned to Canon K.K. (Tokyo).

"Substrate holding board, manufacturing method of device, and exposure device" was invented by Shinji Fukui (Tochigi, Japan), Toshinao Tatsuno (Tochigi, Japan), Hideo Akiba (Tochigi, Japan) and Keiji Hirabayashi (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate holding board includes a first layer and a second layer forming an interfacial surface with the first layer. The first layer and the second layer contain diamond-like carbon. A refractive index of the first layer in a wavelength is higher than a refractive index of the second layer in the wavelength. A distance from ...